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1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards
本方法において定義されるチューブは，管状の形をしており，PFA材質でできている。
setting their values
and behavior are not required to be compliant to this Specification
マーキングシンボルは，新品基板からフルにパターン化済みの基板まで，
E05100 - SEMI E51 - Guide for Typical Facilities Services and Termination Matrix StdPbc-0212 1 The purpose of thisNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The objectives of this Guide are to ensure a timely and cost effective tool installation with minimum impact on the existing customer facilities, systems, and services, and to insure that the quality of
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